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Whatapp:
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
Brief Introduction:
KJ-T1200 Large Diameter CVD Tube Furnace is a splitable tube furnace with 200mm diameter quartz tube, vacuum pump and three channels mass flow meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
Technical Parameter:
KJ-T1200 Large Diameter CVD Tube Furnace is a splitable tube furnace with 200mm diameter quartz tube, vacuum pump and three channels mass flow meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
Technical Parameter:
| Model | KJ-T1200 | |
| Tube Furnace |
Display | LCD Touch Screen |
| Chamber | Split type and upper part can be opened | |
| Continuous Woking Temp. | ≤1100℃ | |
| Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) | |
| Temperature Zone | 500mm Customizable | |
| Heating Element | Resistance wire with Mo | |
| Thermocouple | N type | |
| Temperature Control Accuracy | ±1℃ | |
| Tube Size | 200mm OD X Length 1200 mm Customizable | |
| Material: Quarz Tube | ||
| Temperature Control | PID automatic control via SCR power control | |
| Heating curves | 30 steps programmable | |
| Vacuum Flange | Stainless Steel vacuum flange with valve | |
| Vacuum Pump | Rotary Vane Vacuum Pump Flow rate: 4L/S The rotary vane vacuum pump will be designed into a cart with wheel. Vacuum Degree: 10pa (in cold and empty state) |
|
| Mass Flow Meters LCD Touch Screen |
Three precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2: Gas flow range from 0~100 sccm MFC 3: Gas flow range from 0~100 sccm (or according to your requirement) One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually |
|
| Digital Vacuum Gauge | Pirani digital vacuum gauge | |
